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Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / editors by Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
Material type:
TextSeries: Materials Research Society symposia proceedingsPublication details: Pittsburgh, PA : Materials Research Society, c1988Description: xv, 509 p. : ill. ; 24 cmISBN: - 9780931837692
- 0931837693
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
|
UMPLIB PEKAN | TK7874 .L37 1988 (Browse shelf(Opens below)) | 1 | Available | 0000071828 |
Includes bibliographies references and index