Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors, Gerfried Zwicker ... [et al.]

By:

Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" d (2007 : c San Francisco, Calif.)

Contributor(s):

Zwicker, Gerfried

Material type: Text

TextSeries: Materials Research Society symposium proceedings ; v. 991Publication details: Warrendale, PA. : Materials Research Society, 2007Description: xi, 371 p. : ill. ; 24 cmISBN:

1558999515
9781558999510

Subject(s):

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Holdings ( 1 )
Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB GAMBANG	TK7871.85 .S96 2007 (Browse shelf(Opens below))	1	Available		0000068360

"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref.

Includes bibliographical references and indexes