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		Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park by Paik, Ungyu Park, Jea-Gun Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Boca Raton, FL : CRC Press/Taylor & Francis Group, c2009 Availability: Items available for loan: UMPLIB PEKAN (1)Call number: TK7874.84 .P35 2009. Place hold Log in to add tags Add to cart (remove)
		Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li by Li, Yuzhuo Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Hoboken, N.J. : John Wiley, 2007 Online resources: Table of contents only Availability: Items available for loan: UMPLIB PEKAN (1)Call number: TK7874 .M536 2007. Place hold Log in to add tags Add to cart (remove)
		Chemical-mechanical polishing--fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. / editors, S.V. Babu ... [et al.] by Babu, S. V Series: Materials Research Society symposia proceedings ; v. 566 Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Warrendale, PA : Materials Research Society, 2000 Availability: Items available for loan: UMPLIB PEKAN (1)Call number: TS654.5 .C44 2000. Place hold Log in to add tags Add to cart (remove)
		Chemical-Mechanical Polishing 2000 : fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. / editors, Rajiv K. Singh ... [et al.] by Singh, R. K Series: Materials Research Society symposia proceedings ; v. 613 Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Warrendale, PA : Materials Research Society, c2001 Availability: Items available for loan: UMPLIB PEKAN (1)Call number: TS654.5 .C44 2001. Place hold Log in to add tags Add to cart (remove)
		Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors: Duane S. Boning ... [et al.]. by Boning, Duane S Materials Research Society. Meeting (2003 : San Francisco, Calif.) Series: Materials Research Society symposia proceedings ; v. 767 Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Warrendale, PA : Materials Research Society, 2003 Availability: Items available for loan: UMPLIB GAMBANG (1)Call number: TK7871 .C44 2003. Place hold Log in to add tags Add to cart (remove)
		Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. / editors, Duane S. Boning ... [et al.] by Symposium Boning, Duane S Series: Materials Research Society symposium proceedings ; v. 816 Edition: v. 816 Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Warrendale, PA. : Materials Research Society, c2004 Availability: Items available for loan: UMPLIB GAMBANG (1)Call number: TS654.5 .A38 2004. Place hold Log in to add tags Add to cart (remove)
		Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors, Gerfried Zwicker ... [et al.] by Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" d (2007 : c San Francisco, Calif.) Zwicker, Gerfried Series: Materials Research Society symposium proceedings ; v. 991 Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: Warrendale, PA. : Materials Research Society, 2007 Availability: Items available for loan: UMPLIB GAMBANG (1)Call number: TK7871.85 .S96 2007. Place hold Log in to add tags Add to cart (remove)